Polymethl Methacrylate (PMMA) RIE

SEM image shows a deep structure in PMMA produced by hot embossing. A 30µm thickness of residue has been successfully removed by PlasmaPro RIE 80.

Reproduced with kind permission of: Dr Rötting, Forschungszentrum, Karlsruhe, IMT

Hot embossing is an easy method for the reproduction of microstructures. Under vacuum, a moulding tool is pressed into a heated thermoplastic polymer (PMMA for instance).  For subsequent electroforming of metallic structures, the residual polymer layer that inevitably remains between substrate and molding tool has to be removed. The PlasmaProRIE is a highly suitable tool for such residual removal. An oxygen plasma is used.

Height of PMMA structure: お問い合わせ下さい
Thickness of removed residual layer: お問い合わせ下さい
Narrowest trenches: お問い合わせ下さい
Thinnest PMMA walls: お問い合わせ下さい
Vertical etch rate: お問い合わせ下さい
Horizontal etch rate: お問い合わせ下さい