Aluminium doped Zinc Oxide (ZnO) Sputter Deposition

ZnO has may be deposited using Physical Vapour Deposition (PVD), also known as Sputter Deposition.

 

 

 

Process Specification

  PlasmaPro 100
Deposition rate: お問い合わせください
Refractive Index: お問い合わせください
Uniformity: お問い合わせください
Single wafer size: お問い合わせください