Indium Tin Oxide (ITO) Deposition

ITO has applications in solar cells, touch panel contact, electrodes for LCD and electro chromic, EMC shielding and anti-static coatings. It may be deposited using Physical Vapour Deposition  (PVD), also known as Sputter Deposition. Some process benefits include; good control of film composition, smooth surface and low resistivity.

 

 

Process Specification

  PlasmaPro 100 PlasmaPro System400
Deposition rate: お問い合わせください お問い合わせください
Refractive Index: お問い合わせください お問い合わせください
Uniformity: お問い合わせください お問い合わせください
Single wafer size: お問い合わせください お問い合わせください
Batch size: - お問い合わせください