Silicon Nitride (SiN) Sputter Deposition

SiN has may be deposited using Physical Vapour Deposition (PVD), also known as Sputter Deposition.

Process Specification

  PlasmaPro System400
Deposition rate: お問い合わせ下さい
Refractive Index: お問い合わせ下さい
Uniformity: お問い合わせ下さい
Single wafer size: お問い合わせ下さい
Batch size: お問い合わせ下さい